Vacuum Measurement Gauge
Series 910 DualTrans™ MicroPirani™
Absolute Piezo Transducer


 


Product Features

• Integrated electronics and two sensors in one unit for space savings
• Single continuous reading of 10^-5 to 1,500 Torr
• Low cost gauging alternative
• Reduced process cycle time due to sensor’s fast, accurate and repeatable pressure measurements
• Ease of operation with both analog output and digital communication
• Mountable in any position for ease of installation
• Solid state sensor is resistant to damage from air inrush or vibration
• Accurate atmospheric reading from absolute Piezo, independent of gas type
• Three setpoints with fast response time for reliable process control
• CE marked, compliant with EMC Directive 89/336/EEC

Product Specifications

Sensor Type:	910 MicroPirani™/Absolute Piezo
Measuring Range:	1.0 X 10-5 to 1,500 Torr*
Setpoint Range:	5.0 X 10-4 to 1,500 Torr
Calibration Gas:	Air, Argon, Helium, Nitrogen, H2, H20 vapor. Gas independent above 10 Torr
Operating Temperature Range:	0° to 40°C (32° to 104°F)
Maximum Bake-out Temperature:	85°C (185°F), non-operating
Communication:	RS485 / RS232
Controls:	Zero adjust, span adjust, pressure units, baud rate, address, factory default, setpoint functions: value, hysteresis, direction, enable
Status:	Pressure reading and units, setpoint, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
Relays:	3 relays SPDT
Contact Rating:	1A @ 30VAC/DC, resistive
Relay Response:	Piezo: 25 msec maximum MicroPirani™: 300 msec maximum
Power Requirements:	10 to 30 VDC, 150 ma, < 1.5 W max
Analog Output:	1 to 9.2 VDC, 1 K maximum output impedance, 1 volt/decade
Accuracy (typical):	5.0 X 10-4 to 10-3 Torr ±10% of reading 10-3 to 50 Torr ±5% of reading 50 to 1,000 Torr ±1% of reading
Repeatability:	5.0 X 10-4 to 10-3 Torr ±8% of reading 10-3 to 50 Torr ± 2% of reading 50 to 1,000 Torr ±0.5% of reading
Overpressure Limit:	1,500 Torr
Installation Orientation:	Any
Internal Volume:	0.04 in3 (0.65 cm3) maximum
Materials Exposed to Vacuum:	Silicon, SiO2, SiN4, gold, epoxy resin, stainless steel, Viton®, Ultem® 1000, aluminum
Electronic Casing:	304 stainless steel
Weight (with QF16 Flange):	.46 lbs (209 g)
CE Certification:	EMC Directive 89/336/EEC

* To achieve both accurate and repeatable measurement below 5 X 10^-4 Torr, it is necessary to perform zero calibration of the transducer.